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必发88产品

D系列高压转动/摆动低速旋接器

Heidenhain敞开式直线光栅尺

Heidenhain敞开式直线光栅尺与读数头和光栅尺或钢带间没有机械接触。这些光栅尺的典型应用包括:测量机、比较仪和其它长度计量精密设备以及生产和测量设备,例如用在半导体工业中。
马上询价:189 1774 1718
产品简述


Heidenhain敞开式直线光栅尺//海德汉敞开式直线光栅尺


敞开式光栅尺与读数头和光栅尺或钢带间没有机械接触。这些光栅尺的典型应用包括:测量机、比较仪和其它长度计量精密设备以及生产和测量设备,例如用在半导体工业中。

敞开式直线光栅尺设计用于需要高精度测量的机床和系统
典型应用包括:

  • 半导体工业的测量和生产设备
  • PCB电路板组装机
  • 超精密机床
  • 高精度机床
  • 测量机和比较仪,测量显微镜和其它精密测量设备
  • 直接驱动
  • 海德汉系统
    海德汉光栅
    海德汉编码器

    Heidenhain
    Heidenhain数控系统

    敞开式直线光栅尺 



Absolute encoders and encoders with position value output

LIC

The LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 27 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400.

± 0.08 ?m

Up to 27040 mm

 LIP 200

The LIP 211 and LIP 291 incremental linear encoders output the position information as a position value. The sinusoidal scanning signals are highly interpolated in the scanning head and converted to a position value by the integrated counter function. As with all incremental encoders, the absolute reference is determined with the aid of reference marks.

± 0.001 ?m

Da 20 mm a 3040 mm

Incremental encoders

LIP

The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard.

Up to ± 0.04 ?m

Up to 3040 mm

LIF

The LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10–7 bar (see separate Product Information sheet).

± 0.04 ?m

Up to 1020 mm

LIDA

The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch.

Up to ± 0.2 ?m

Up to 30040 mm

PP

On the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane.

± 0.04 ?m

Measuring range 68x68mm

LIC 4100

Type

Substrate and mounting

Coefficient of
expansion 

Position error per signal period

Meas.
length

LIC 4113
undefinedLIC 4193

Glass or glass ceramic scale, bonded to the mounting surface

≈ (0±0,1) x 10-6K-1

≈ 8 x 10-6K-1

± 0,04 μm

240 mm to 3040 mm

LIC 4115
LIC 4195

Steel scale tape drawn into aluminum extrusions and tensioned

Same as mounting surface

± 0,04 μm

140 mm to 28440 mm

LIC 4117
LIC 4197

Steel scale tape drawn into aluminum extrusions and fixed

≈ 10 x 10-6K-1

± 0,04 μm

240mm to 6040 mm

LIC 4119
LIC 4199

Steel scale tape, cemented on mounting surface

≈ 10 x 10-6K-1

± 0,04 μm

70 mm to 1020 mm

LIC 2100

Type

Substrate and mounting

Coefficient of expansion

Position error per signal period

Meas. length

LIC 2117
LIC 2197

Steel scale tape drawn into aluminum extrusions and fixed

? ≈ 10 x 10-6K-1

± 1,5 μm

120 mm to 3020 mm

LIC 2119
LIC 2199

Steel scale tape, cemented on mounting surface

 ≈ 10 x 10-6K-1

± 1,5 μm

120 mm to 3040 mm

LIDA series for high traversing speeds and large measuring lengths

Model

Substrate and mounting

Expansion
coefficient

Position error
per signal period

Measuring length

Interface

LIDA 473
LIDA 483

Glass or glass ceramic scale, bonded to the mounting surface

≈ 0 x 10-6K-1
or
≈ 8 x 10-6K-1

± 0.2 μm

240 mm to 3040 mm

TTL
1 VPP

LIDA 475
LIDA 485

Steel scale tape drawn into aluminum extrusions and tensioned

Same as mounting surface

± 0.2 μm

140 mm to 30040 mm

TTL
1 VPP

LIDA 477
LIDA 487

Steel scale tape drawn into aluminum extrusions and fixed

≈ 10 x 10-6K-1

± 0.2 μm

240 mm to 6040 mm

TTL
1 VPP

LIDA 479
LIDA 489

Steel scale tape, cemented on mounting surface

≈ 10 x 10-6K-1

± 0.2 μm

Up to 6000 mm

TTL
1 VPP

LIDA 277
LIDA 287

Steel scale tape drawn into aluminum extrusions and fixed

≈ 10 x 10-6K-1

± 2 μm

Up to 10000 mm

TTL
1 VPP

LIDA 279
LIDA 289

Steel scale tape, cemented on mounting surface

≈ 10 x 10-6K-1

± 2 μm

Up to 10000 mm

TTL
1 VPP

LIF series for high accuracy

Model

Substrate and mounting

Expansion 
coefficient 

Position error
per signal period

Measuring length

Interface

LIF 471
LIF 481

Scale of Zerodur glass ceramic 
or glass, bonded with
PRECIMET adhesive film

≈ 8 x 10-6K-1

± 0.04 μm

70 mm to 1020 mm

TTL
1 VPP

LIP series for very high accuracy

Model

Substrate and mounting

Expansion
coefficient

Position error
per signal period

Measuring length

Interface

LIP 372
LIP 382

Zerodur glass ceramic embedded 
in bolted-on Invar carrier

≈ 0 x 10-6K-1

± 0.001 μm

70 mm to 270 mm

TTL
1 VPP

LIP 211
LIP 281
LIP 291

Scale of Zerodur glass ceramic 
with fixing clamps

≈ 0 x 10-6K-1

± 0.001 μm

20 mm to 3040 mm

1 VPP
EnDat 2.2

LIP 471
LIP 481

Scale of Zerodur glass ceramic 
or glass with fixing clamps

≈ 0 x 10-6K-1
or

≈ 8 x 10-6K-1

± 0.02 μm

70 mm up to 3040 mm

TTL
1 VPP

LIP 571
LIP 581

Glass scale, fixed with clamps

≈ 8 x 10-6K-1

± 0.04 μm

70 mm to 1020 mm

TTL
1 VPP

海德汉
海德汉数控系统
Heidenhain光栅

 
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